- Automatic beam axis-alignment functions
- High SE resolution of 10nm operating from 0.5-30kV.
- Backscatter BSE resolution 20nm at 25kV.
- Environmental chamber operating in variable pressure
range from 1 to 270 Pa.
- Magnification of 15X to 200,000X.
Standard 40mmx40mm Specimen Stage
- Dynamic Focus, Digital Beam control, Raster
rotation, Measurement function.
- Real time, dual image display and signal mixing.
Mechanical stage with high tilt (-20 ~+70).
New Users to CMI
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