NUI Galway NBIPI cmi

Hitachi S2600N Variable Pressure Scanning Electron Microscope

 
  • Automatic beam axis-alignment functions
  • High SE resolution of 10nm operating from 0.5-30kV.
  • Backscatter BSE resolution 20nm at 25kV.
  • Environmental chamber operating in variable pressure range from 1 to 270 Pa.
  • Magnification of 15X to  200,000X. Standard 40mmx40mm Specimen Stage .
  • Dynamic Focus, Digital Beam control, Raster rotation, Measurement function.
  • Real time, dual image display and signal mixing. Mechanical stage with high tilt (-20 ~+70).


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