Automatic beam axis-alignment functions

High SE resolution of 10nm operating from 0.5-30kV.

Backscatter BSE resolution 20nm at 25kV.

Environmental chamber operating in variable pressure range from 1 to 270 Pa. Magnification of 15X to  200,000X. 

Standard 40mmx40mm Specimen Stage .

Dynamic Focus, Digital Beam control, Raster rotation, Measurement function.

Real time, dual image display and signal mixing.Mechanical stage with high tilt (-20 ~+70).