Automatic beam axis-alignment functions
High SE resolution of 10nm operating from 0.5-30kV.
Backscatter BSE resolution 20nm at 25kV.
Environmental chamber operating in variable pressure range from 1 to 270 Pa. Magnification of 15X to 200,000X.
Standard 40mmx40mm Specimen Stage .
Dynamic Focus, Digital Beam control, Raster rotation, Measurement function.
Real time, dual image display and signal mixing.Mechanical stage with high tilt (-20 ~+70).